Transversely-excited film bulk acoustic resonator

ABSTRACT

Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate having a surface and a single-crystal piezoelectric plate having parallel front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer (IDT) is formed on the front surface of the single-crystal piezoelectric plate such that interleaved fingers of the IDT are disposed on the diaphragm. The IDT is configured to excite a primary acoustic mode in the diaphragm in response to a radio frequency signal applied to the IDT. A direction of acoustic energy flow of the primary acoustic mode is substantially orthogonal to the front and back surfaces of the diaphragm. The diaphragm is contiguous with the piezoelectric plate around at least 50% of a perimeter of the cavity.

RELATED APPLICATION INFORMATION

This patent is a continuation-in-part of application Ser. No.16/230,443, filed Dec. 21, 2018, entitled TRANSVERSELY-EXCITED FILM BULKACOUSTIC RESONATOR, now U.S. Pat. No. 10,491,192, which claims priorityfrom the following provisional patent applications: application62/685,825, filed Jun. 15, 2018, entitled SHEAR-MODE FBAR (XBAR);application 62/701,363, filed Jul. 20, 2018, entitled SHEAR-MODE FBAR(XBAR); application 62/741,702, filed Oct. 5, 2018, entitled 5 GHZLATERALLY-EXCITED BULK WAVE RESONATOR (XBAR); application 62/748,883,filed Oct. 22, 2018, entitled SHEAR-MODE FILM BULK ACOUSTIC RESONATOR;and application 62/753,815, filed Oct. 31, 2018, entitled LITHIUMTANTALATE SHEAR-MODE FILM BULK ACOUSTIC RESONATOR. All of theseapplications are incorporated herein by reference.

NOTICE OF COPYRIGHTS AND TRADE DRESS

A portion of the disclosure of this patent document contains materialwhich is subject to copyright protection. This patent document may showand/or describe matter which is or may become trade dress of the owner.The copyright and trade dress owner has no objection to the facsimilereproduction by anyone of the patent disclosure as it appears in thePatent and Trademark Office patent files or records, but otherwisereserves all copyright and trade dress rights whatsoever.

BACKGROUND Field

This disclosure relates to radio frequency filters using acoustic waveresonators, and specifically to filters for use in communicationsequipment.

Description of the Related Art

A radio frequency (RF) filter is a two-port device configured to passsome frequencies and to stop other frequencies, where “pass” meanstransmit with relatively low signal loss and “stop” means block orsubstantially attenuate. The range of frequencies passed by a filter isreferred to as the “pass-band” of the filter. The range of frequenciesstopped by such a filter is referred to as the “stop-band” of thefilter. A typical RF filter has at least one pass-band and at least onestop-band. Specific requirements on a pass-band or stop-band depend onthe specific application. For example, a “pass-band” may be defined as afrequency range where the insertion loss of a filter is better than adefined value such as 1 dB, 2 dB, or 3 dB. A “stop-band” may be definedas a frequency range where the rejection of a filter is greater than adefined value such as 20 dB, 30 dB, 40 dB, or greater depending onapplication.

RF filters are used in communications systems where information istransmitted over wireless links. For example, RF filters may be found inthe RF front-ends of cellular base stations, mobile telephone andcomputing devices, satellite transceivers and ground stations, IoT(Internet of Things) devices, laptop computers and tablets, fixed pointradio links, and other communications systems. RF filters are also usedin radar and electronic and information warfare systems.

RF filters typically require many design trade-offs to achieve, for eachspecific application, the best compromise between performance parameterssuch as insertion loss, rejection, isolation, power handling, linearity,size and cost. Specific design and manufacturing methods andenhancements can benefit simultaneously one or several of theserequirements.

Performance enhancements to the RF filters in a wireless system can havebroad impact to system performance. Improvements in RF filters can beleveraged to provide system performance improvements such as larger cellsize, longer battery life, higher data rates, greater network capacity,lower cost, enhanced security, higher reliability, etc. Theseimprovements can be realized at many levels of the wireless system bothseparately and in combination, for example at the RF module, RFtransceiver, mobile or fixed sub-system, or network levels.

The desire for wider communication channel bandwidths will inevitablylead to the use of higher frequency communications bands. The currentLTE™ (Long Term Evolution) specification defines frequency bands from3.3 GHz to 5.9 GHz. Some of these bands are not presently used. Futureproposals for wireless communications include millimeter wavecommunication bands with frequencies up to 28 GHz.

High performance RF filters for present communication systems commonlyincorporate acoustic wave resonators including surface acoustic wave(SAW) resonators, bulk acoustic wave BAW) resonators, film bulk acousticwave resonators (FBAR), and other types of acoustic resonators. However,these existing technologies are not well-suited for use at the higherfrequencies proposed for future communications networks.

DESCRIPTION OF THE DRAWINGS

FIG. 1 includes a schematic plan view and two schematic cross-sectionalviews of a transversely-excited film bulk acoustic resonator (XBAR).

FIG. 2 is an expanded schematic cross-sectional view of a portion of theXBAR of FIG. 1.

FIG. 3A is an alternative schematic cross-sectional view of the XBAR ofFIG. 1.

FIG. 3B is another alternative schematic cross-sectional view of theXBAR of FIG. 1.

FIG. 3C is an alternative schematic plan view of an XBAR

FIG. 4 is a graphic illustrating a shear horizontal acoustic mode in anXBAR.

FIG. 5 is a chart of the admittance of a simulated XBAR.

FIG. 6 is a chart comparing the admittances of three simulated XBARswith different dielectric layers.

FIG. 7 is a chart comparing the admittances of four simulated XBARs withdifferent dielectric layer thicknesses.

FIG. 8 is a plot showing the effect of piezoelectric plate thickness onresonance frequency of an XBAR.

FIG. 9 is a plot showing the effect of front dielectric layer thicknesson resonance frequency of an XBAR.

FIG. 10 is a plot showing the effect of IDT finger pitch on resonancefrequency of an XBAR.

FIG. 11 is a chart comparing the admittances of XBARs on LiNbO3 andLiTaO3 plates.

FIG. 12 is a chart of the measured admittance of an XBAR.

FIG. 13 is another chart of the measured admittance of an XBAR.

FIG. 14 is a schematic circuit diagram and layout of a filter usingXBARs.

FIG. 15 is a graph of the transfer curve (S21) of an embodiment of thefilter of FIG. 12.

FIG. 16 is a graph of the transfer curve (S21) of another embodiment ofthe filter of FIG. 12.

FIG. 17 is a flow chart of a process for fabricating an XBAR.

Throughout this description, elements appearing in figures are assignedthree-digit or four-digit reference designators, where the two leastsignificant digits are specific to the element and the one or two mostsignificant digit is the figure number where the element is firstintroduced. An element that is not described in conjunction with afigure may be presumed to have the same characteristics and function asa previously-described element having the same reference designator.

DETAILED DESCRIPTION

Description of Apparatus

FIG. 1 shows a simplified schematic top view and orthogonalcross-sectional views of a transversely-excited film bulk acousticresonator (XBAR) 100. XBAR resonators such as the resonator 100 may beused in a variety of RF filters including band-reject filters, band-passfilters, duplexers, and multiplexers. XBARs are particularly suited foruse in filters for communications bands with frequencies above 3 GHz.

The XBAR 100 is made up of a thin film conductor pattern formed on asurface of a piezoelectric plate 110 having parallel front and backsurfaces 112, 114, respectively. The piezoelectric plate is a thinsingle-crystal layer of a piezoelectric material such as lithiumniobate, lithium tantalate, lanthanum gallium silicate, gallium nitride,or aluminum nitride. The piezoelectric plate is cut such that theorientation of the X, Y, and Z crystalline axes with respect to thefront and back surfaces is known and consistent. In the examplespresented in this patent, the piezoelectric plates are Z-cut, which isto say the Z axis is normal to the front and back surfaces 112, 114.However, XBARs may be fabricated on piezoelectric plates with othercrystallographic orientations.

The back surface 114 of the piezoelectric plate 110 is attached to asurface of the substrate 120 except for a portion of the piezoelectricplate 110 that forms a diaphragm 115 spanning a cavity 140 formed in thesubstrate. The portion of the piezoelectric plate that spans the cavityis referred to herein as the “diaphragm” 115 due to its physicalresemblance to the diaphragm of a microphone. As shown in FIG. 1, thediaphragm 115 is contiguous with the rest of the piezoelectric plate 110around all of a perimeter 145 of the cavity 140. In this context,“contiguous” means “continuously connected without any interveningitem”.

The substrate 120 provides mechanical support to the piezoelectric plate110. The substrate 120 may be, for example, silicon, sapphire, quartz,or some other material or combination of materials. The back surface 114of the piezoelectric plate 110 may be bonded to the substrate 120 usinga wafer bonding process. Alternatively, the piezoelectric plate 110 maybe grown on the substrate 120 or attached to the substrate in some othermanner. The piezoelectric plate 110 may be attached directly to thesubstrate or may be attached to the substrate 120 via one or moreintermediate material layers.

“Cavity” has its conventional meaning of “an empty space within a solidbody.” The cavity 140 may be a hole completely through the substrate 120(as shown in Section A-A and Section B-B) or a recess in the substrate120 (as shown subsequently in FIG. 3A and FIG. 3B). The cavity 140 maybe formed, for example, by selective etching of the substrate 120 beforeor after the piezoelectric plate 110 and the substrate 120 are attached.

The conductor pattern of the XBAR 100 includes an interdigitaltransducer (IDT) 130. The IDT 130 includes a first plurality of parallelfingers, such as finger 136, extending from a first busbar 132 and asecond plurality of fingers extending from a second busbar 134. Thefirst and second pluralities of parallel fingers are interleaved. Theinterleaved fingers overlap for a distance AP, commonly referred to asthe “aperture” of the IDT. The center-to-center distance L between theoutermost fingers of the IDT 130 is the “length” of the IDT.

The first and second busbars 132, 134 serve as the terminals of the XBAR100. A radio frequency or microwave signal applied between the twobusbars 132, 134 of the IDT 130 excites a primary acoustic mode withinthe piezoelectric plate 110. As will be discussed in further detail, theprimary acoustic mode is a bulk shear mode where acoustic energypropagates along a direction substantially orthogonal to the surface ofthe piezoelectric plate 110, which is also normal, or transverse, to thedirection of the electric field created by the IDT fingers. Thus, theXBAR is considered a transversely-excited film bulk wave resonator.

The IDT 130 is positioned on the piezoelectric plate 110 such that atleast the fingers of the IDT 130 are disposed on the portion 115 of thepiezoelectric plate that spans, or is suspended over, the cavity 140. Asshown in FIG. 1, the cavity 140 has a rectangular shape with an extentgreater than the aperture AP and length L of the IDT 130. A cavity of anXBAR may have a different shape, such as a regular or irregular polygon.The cavity of an XBAR may more or fewer than four sides, which may bestraight or curved.

For ease of presentation in FIG. 1, the geometric pitch and width of theIDT fingers is greatly exaggerated with respect to the length (dimensionL) and aperture (dimension AP) of the XBAR. A typical XBAR has more thanten parallel fingers in the IDT 110. An XBAR may have hundreds, possiblythousands, of parallel fingers in the IDT 110. Similarly, the thicknessof the fingers in the cross-sectional views is greatly exaggerated.

FIG. 2 shows a detailed schematic cross-sectional view of the XBAR 100.The piezoelectric plate 110 is a single-crystal layer of piezoelectricalmaterial having a thickness ts. ts may be, for example, 100 nm to 1500nm. When used in filters for LTE™ bands from 3.4 GHZ to 6 GHz (e.g.bands 42, 43, 46), the thickness ts may be, for example, 200 nm to 1000nm.

A front-side dielectric layer 214 may optionally be formed on the frontside of the piezoelectric plate 110. The “front side” of the XBAR is, bydefinition, the surface facing away from the substrate. The front-sidedielectric layer 214 has a thickness tfd. The front-side dielectriclayer 214 is formed between the IDT fingers 238. Although not shown inFIG. 2, the front side dielectric layer 214 may also be deposited overthe IDT fingers 238. A back-side dielectric layer 216 may optionally beformed on the back side of the piezoelectric plate 110. The back-sidedielectric layer 216 has a thickness tbd. The front-side and back-sidedielectric layers 214, 216 may be a non-piezoelectric dielectricmaterial, such as silicon dioxide or silicon nitride. tfd and tbd maybe, for example, 0 to 500 nm. tfd and tbd are typically less than thethickness ts of the piezoelectric plate. tfd and tbd are not necessarilyequal, and the front-side and back-side dielectric layers 214, 216 arenot necessarily the same material. Either or both of the front-side andback-side dielectric layers 214, 216 may be formed of multiple layers oftwo or more materials.

The IDT fingers 238 may be aluminum, a substantially aluminum alloys,copper, a substantially copper alloys, beryllium, gold, or some otherconductive material. Thin (relative to the total thickness of theconductors) layers of other metals, such as chromium or titanium, may beformed under and/or over the fingers to improve adhesion between thefingers and the piezoelectric plate 110 and/or to passivate orencapsulate the fingers. The busbars (132, 134 in FIG. 1) of the IDT maybe made of the same or different materials as the fingers.

Dimension p is the center-to-center spacing or “pitch” of the IDTfingers, which may be referred to as the pitch of the IDT and/or thepitch of the XBAR. Dimension w is the width or “mark” of the IDTfingers. The IDT of an XBAR differs substantially from the IDTs used insurface acoustic wave (SAW) resonators. In a SAW resonator, the pitch ofthe IDT is one-half of the acoustic wavelength at the resonancefrequency. Additionally, the mark-to-pitch ratio of a SAW resonator IDTis typically close to 0.5 (i.e. the mark or finger width is aboutone-fourth of the acoustic wavelength at resonance). In an XBAR, thepitch p of the IDT is typically 2 to 20 times the width w of thefingers. In addition, the pitch p of the IDT is typically 2 to 20 timesthe thickness is of the piezoelectric slab 212. The width of the IDTfingers in an XBAR is not constrained to one-fourth of the acousticwavelength at resonance. For example, the width of XBAR IDT fingers maybe 500 nm or greater, such that the IDT can be fabricated using opticallithography. The thickness tm of the IDT fingers may be from 100 nm toabout equal to the width w. The thickness of the busbars (132, 134 inFIG. 1) of the IDT may be the same as, or greater than, the thickness tmof the IDT fingers.

FIG. 3A and FIG. 3B show two alternative cross-sectional views along thesection plane A-A defined in FIG. 1. In FIG. 3A, a piezoelectric plate310 is attached to a substrate 320. A portion of the piezoelectric plate310 forms a diaphragm 315 spanning a cavity 340 in the substrate. Thecavity 340 does not fully penetrate the substrate 320. Fingers of an IDTare disposed on the diaphragm 315. The cavity 340 may be formed, forexample, by etching the substrate 320 before attaching the piezoelectricplate 310. Alternatively, the cavity 340 may be formed by etching thesubstrate 320 with a selective etchant that reaches the substratethrough one or more openings (not shown) provided in the piezoelectricplate 310. In this case, the diaphragm 315 may be contiguous with therest of the piezoelectric plate 310 around a large portion of aperimeter 345 of the cavity 340. For example, the diaphragm 315 may becontiguous with the rest of the piezoelectric plate 310 around at least50% of the perimeter 345 of the cavity 340.

In FIG. 3B, the substrate 320 includes a base 322 and an intermediatelayer 324 disposed between the piezoelectric plate 310 and the base 322.For example, the base 322 may be silicon and the intermediate layer 324may be silicon dioxide or silicon nitride or some other material. Aportion of the piezoelectric plate 310 forms a diaphragm 315 spanning acavity 340 in the intermediate layer 324. Fingers of an IDT are disposedon the diaphragm 315. The cavity 340 may be formed, for example, byetching the intermediate layer 324 before attaching the piezoelectricplate 310. Alternatively, the cavity 340 may be formed by etching theintermediate layer 324 with a selective etchant that reaches thesubstrate through one or more openings provided in the piezoelectricplate 310. In this case, the diaphragm 315 may be contiguous with therest of the piezoelectric plate 310 around a large portion of aperimeter 345 of the cavity 340. For example, the diaphragm 315 may becontiguous with the rest of the piezoelectric plate 310 around at least50% of the perimeter 345 of the cavity 340. Although not shown in FIG.3B, a cavity formed in the intermediate layer 324 may extend into thebase 322.

FIG. 3C is a schematic plan view of another XBAR 350. The XBAR 350includes an IDT formed on a piezoelectric plate 310. A portion of thepiezoelectric plate 310 forms a diaphragm spanning a cavity in asubstrate. In this example, the perimeter 345 of the cavity has anirregular polygon shape such that none of the edges of the cavity areparallel, nor are they parallel to the conductors of the IDT. A cavitymay have a different shape with straight or curved edges.

FIG. 4 is a graphical illustration of the primary acoustic mode ofinterest in an XBAR. FIG. 4 shows a small portion of an XBAR 400including a piezoelectric plate 410 and three interleaved IDT fingers430. An RF voltage is applied to the interleaved fingers 430. Thisvoltage creates a time-varying electric field between the fingers. Thedirection of the electric field is lateral, or parallel to the surfaceof the piezoelectric plate 410, as indicated by the arrows labeled“electric field”. Due to the high dielectric constant of thepiezoelectric plate, the electric field is highly concentrated in theplate relative to the air. The lateral electric field introduces sheardeformation, and thus strongly excites a shear-mode acoustic mode, inthe piezoelectric plate 410. In this context, “shear deformation” isdefined as deformation in which parallel planes in a material remainparallel and maintain a constant distance while translating relative toeach other. A “shear acoustic mode” is defined as an acoustic vibrationmode in a medium that results in shear deformation of the medium. Theshear deformations in the XBAR 400 are represented by the curves 460,with the adjacent small arrows providing a schematic indication of thedirection and magnitude of atomic motion. The degree of atomic motion,as well as the thickness of the piezoelectric plate 410, have beengreatly exaggerated for ease of visualization. While the atomic motionsare predominantly lateral (i.e. horizontal as shown in FIG. 4), thedirection of acoustic energy flow of the excited primary shear acousticmode is substantially orthogonal to the surface of the piezoelectricplate, as indicated by the arrow 465.

Considering FIG. 4, there is essentially no electric field immediatelyunder the IDT fingers 430, and thus acoustic modes are only minimallyexcited in the regions 470 under the fingers. There may be evanescentacoustic motions in these regions. Since acoustic vibrations are notexcited under the IDT fingers 430, the acoustic energy coupled to theIDT fingers 430 is low (for example compared to the fingers of an IDT ina SAW resonator), which minimizes viscous losses in the IDT fingers.

An acoustic resonator based on shear acoustic wave resonances canachieve better performance than current state-of-the artfilm-bulk-acoustic-resonators (FBAR) and solidly-mounted-resonatorbulk-acoustic-wave (SMR BAW) devices where the electric field is appliedin the thickness direction. In such devices, the acoustic mode iscompressive with atomic motions and the direction of acoustic energyflow in the thickness direction. In addition, the piezoelectric couplingfor shear wave XBAR resonances can be high (>20%) compared to otheracoustic resonators. Thus high piezoelectric coupling enables the designand implementation of microwave and millimeter-wave filters withappreciable bandwidth.

FIG. 5 is a chart 500 with a plot 510 of the normalized magnitude of theadmittance (on a logarithmic scale) as a function of frequency of anXBAR simulated using finite element method (FEM) simulation techniques.In the simulated XBAR, the piezoelectric plate is Z-cut (i.e. Z axisnormal to the plate) lithium niobate. The IDT fingers are aluminum. TheIDT is oriented such that the y-axis of the piezoelectric plate isnormal to the IDT fingers. The substrate supporting the piezoelectricplate is silicon with a cavity formed completely through the silicon (asshown in FIG. 1). Losses in the piezoelectric plate and IDT fingers weresimulated using standard material parameters. The simulated physicaldimensions are as follows: ts=400 nm; tfd=0; tbd=0; tm=100 nm; p=5 um;w=500 nm. The admittance is normalized for a single pair of IDT fingersand an aperture of 1 meter. The admittance of an XBAR with N IDT fingersand an aperture A (in m) can be estimated by multiplying the normalizedadmittance provided in FIG. 5 by (N−1)·A.

The simulated XBAR exhibits a resonance at a frequency FR of 4693 MHzand an anti-resonance at a frequency FAR of 5306 MHz. The Q at resonanceQR is 2645 and the Q at anti-resonance QAR is 4455. The absolutedifference between FAR and FR is about 600 MHz, and the fractionaldifference is about 0.12. The acoustic coupling can be roughly estimatedto the 24%. Secondary resonances are evident in the admittance curve atfrequencies below FR and above FAR.

Acoustic RF filters usually incorporate multiple acoustic resonators.Typically, these resonators have at least two different resonancefrequencies. For example, an RF filter using the well-known “ladder”filter architecture includes shunt resonators and series resonators. Ashunt resonator typically has a resonance frequency below the passbandof the filter and an anti-resonance frequency within the passband. Aseries resonator typically has a resonance frequency within the passband and an anti-resonance frequency above the passband. In manyfilters, each resonator has a unique resonance frequency. An ability toobtain different resonance frequencies for XBARs made on the samepiezoelectric plate greatly simplifies the design and fabrication of RFfilters using XBARs.

FIG. 6 is a graph 600 comparing the normalized admittances, as functionsof frequency, of three XBARs with different dielectric layers. Theadmittance data results from two-dimensional simulation of a XBARstructure using the same materials and dimensions (except for thedielectric layers) as the previous example. The admittance is normalizedfor a single pair of IDT fingers and an aperture of 1 m. The solid line610 is a plot of the normalized admittance per unit aperture for an XBARwith tfd=tbd=0 (i.e. an XBAR without dielectric layers). The normalizedadmittance of this XBAR is comparable to the normalized admittance plotin FIG. 5, with slight differences due to the different simulationmethodologies. The dashed line 620 is a plot of the normalizedadmittance for an XBAR with 100 nm of SiO2 on the front surface of thepiezoelectric slab between the IDT fingers (tfd=100 nm and tbd=0). Theaddition of the SiO2 layer on the front surface of the piezoelectricplate shifts the resonance frequency down by about 500 MHz, or about11%, compared to the XBAR with no dielectric layers. The dash-dot line630 is a plot of the normalized admittance for an XBAR with 100 nm ofSiO2 over the front surface of the piezoelectric slab between the IDTfingers and 100 nm of SiO2 on the back surface of the piezoelectric slab(tfd=tbd=100 nm). The addition of the SiO2 layers on both surfaces ofthe piezoelectric plate shifts the resonance frequency down by about 900MHz, or 20%, compared to the XBAR with no dielectric layers.

FIG. 7 is a graph 700 comparing the admittances, as functions offrequency, of four XBARs with different front-side dielectric layerthicknesses. The admittance data results from three-dimensionalsimulation of XBARs with the following parameter: ts=400 nm; tfd=0, 30,60, 90 nm; tbd=0; tm=100 nm; p=4.2 um; w=500 nm; AP=20 um; and N (totalnumber of IDT fingers)=51. The substrate is Z-cut lithium niobate, theIDT conductors are aluminum, and the dielectric layers are SiO2.

The solid line 710 is a plot of the admittance of an XBAR with tfd=0(i.e. an XBAR without dielectric layers). The dashed line 720 is a plotof the admittance of an XBAR with tfd=30 nm. The addition of the 30 nmdielectric layer reduces the resonant frequency by about 145 MHzcompared to the XBAR without dielectric layers. The dash-dot line 730 isa plot of the admittance of an XBAR with tfd=60 nm. The addition of the60 nm dielectric layer reduces the resonant frequency by about 305 MHzcompared to the XBAR without dielectric layers. The dash-dot-dot line740 is a plot of the admittance of an XBAR with tfd=90 nm. The additionof the 90 nm dielectric layer reduces the resonant frequency by about475 MHz compared to the XBAR without dielectric layers. The frequencyand magnitude of the secondary resonances are affected differently thanthe primary shear-mode resonance.

Importantly, the presence of the dielectric layers of variousthicknesses has little or no effect on the piezoelectric coupling, asevidenced by the nearly constant frequency offset between the resonanceand anti-resonance of each XBAR.

FIG. 8, FIG. 9, and FIG. 10 are graphs showing the dependence,determined by simulation, of resonant frequency on XBAR physicalcharacteristics. Specifically, FIG. 8 is a graph of resonant frequencyas a function of piezoelectric plate thickness ts with IDT finger pitchp=3 microns and no front-side or back-side dielectric layer (tfd=tbd=0).FIG. 9 is a graph of resonant frequency as a function of front-sidedielectric layer thickness tfd for piezoelectric plate thickness ts=400nm and IDT finger pitch p=3 microns. FIG. 10 is a graph of resonantfrequency as a function of IDT finger pitch p with piezoelectric platethickness ts=400 nm and tfd=tbd=0. In all cases, the piezoelectricsubstrate is Z-cut lithium niobate and the IDT fingers were aluminumwith a width w=500 nm and thickness tm=100 nm. The front-side dielectriclayer, when present, is SiO2.

FIG. 11 is a graph 1100 comparing the admittances, as functions offrequency, of two XBARs with different piezoelectric plate materials.The admittance data results from three-dimensional simulation of XBARswith the following parameter: ts=415 nm; tfd=120 nm; tbd=0; tm=460 nm;p=4.5 um; w=700 nm; AP=71 um; and N (total number of IDT fingers)=221.The substrate is Z-cut lithium niobite or Z-cut lithium tantalate, theIDT electrodes are copper, and the dielectric layer is SiO2.

The solid line 1110 is a plot of the admittance of an XBAR on a lithiumniobate plate. The dashed line 1120 is a plot of the admittance of anXBAR on a lithium tantalate plate. Notably, the difference between theresonance and anti-resonance frequencies of the lithium tantalate XBARis about 5%, or half of the frequency difference of the lithium niobateXBAR. The lower frequency difference of the lithium tantalate XBAR isdue to the weaker piezoelectric coupling of the material. The measuredtemperature coefficient of the resonance frequency of a lithium niobateXBAR is about −71 parts-per-million per degree Celsius. The temperaturecoefficient (TCF) of frequency for lithium tantalate XBARs will be abouthalf that of lithium niobate XBARs. Lithium tantalate XBARs may be usedin applications that do not require the large filter bandwidth possiblewith lithium niobate XBARs and where the reduced TCF is advantageous.

FIG. 12 is a chart showing the measured admittance of an experimentalXBAR fabricated on a Z-cut lithium niobate plate with a thickness of 400nm. The IDT had a pitch of 5 um, an aperture of 40 um, and 101 IDTfingers. The IDT fingers were aluminum with a thickness of 100 nm. Thedevice did not include dielectric layers. The solid line 1210 is themagnitude of admittance as a function of frequency. The resonancefrequency is 4617 MHz and the anti-resonance frequency is 5138 MHz. Thefrequency difference is 521 MHz or more than 11% of the resonancefrequency. The measured data has not been corrected for the effects ofthe measurement system. Typically, correcting for the measurement systemincreases the anti-resonance frequency and the different between theanti-resonance and resonance frequencies.

FIG. 13 is a chart showing the measured admittance of anotherexperimental XBAR fabricated on a Z-cut lithium niobate plate with athickness of 400 nm. The IDT had a pitch of 5 um, an aperture of 20 um,and 51 fingers. The IDT fingers were aluminum with a thickness of 100nm. The device did not include dielectric layers. The solid line 1310 isthe magnitude of admittance as a function of frequency. The third andfifth harmonics of the primary XBAR resonance are visible at about 13.5GHz and 22.5 GHz, respectively. Resonances have been measured in otherXBARs at frequencies as high as 60 GHz.

FIG. 14 is a schematic circuit diagram and layout for a high frequencyband-pass filter 1200 using XBARs. The filter 1400 has a conventionalladder filter architecture including three series resonators 1410A,14110B, 1410C and two shunt resonators 1420A, 1420B. The three seriesresonators 1410A, 1410B, and 1410C are connected in series between afirst port and a second port. In FIG. 14, the first and second ports arelabeled “In” and “Out”, respectively. However, the filter 1400 issymmetrical and either port and serve as the input or output of thefilter. The two shunt resonators 1420A, 1420B are connected from nodesbetween the series resonators to ground. All the shunt resonators andseries resonators are XBARs.

The three series resonators 1410A, B, C and the two shunt resonators1420A, B of the filter 1400 are formed on a single plate 1430 ofpiezoelectric material bonded to a silicon substrate (not visible). Eachresonator includes a respective IDT (not shown), with at least thefingers of the IDT disposed over a cavity in the substrate. In this andsimilar contexts, the term “respective” means “relating things each toeach”, which is to say with a one-to-one correspondence. In FIG. 14, thecavities are illustrated schematically as the dashed rectangles (such asthe rectangle 1435). In this example, each IDT is disposed over arespective cavity. In other filters, the IDTs of two or more resonatorsmay be disposed over a single cavity.

FIG. 15 is a chart showing results from simulating a first bandpassfilter incorporating five XBARs. The schematic diagram of the firstfilter is the same as the filter 1400 of FIG. 14. The XBARs are formedon a 0.4 micron thickness Z-cut lithium niobate plate. The substrate issilicon, the IDT conductors are aluminum, and there are no dielectriclayers. The other physical parameters of the resonators are provided inthe following table (all dimensions are in microns):

Series Resonators Shunt Resonators Parameter 1410A 1410B 1410C 1420A1420B p 1.475 1.475 1.525 3.52 3.52 w 0.53 0.53 0.515 0.51 0.51 AP 12.88.6 13.8 33 40 L 250 250 250 500 500

The performance of the first filter was simulated using a 3D finiteelement modeling tool. The curve 1510 is a plot of the magnitude of S21,the input-output transfer function, of the first filter as a function offrequency. The filter bandwidth is about 800 MHz, centered at 5.15 GHz.The simulated filter performance includes resistive and viscous losses.Tuning of the resonant frequencies of the various resonators isaccomplished by varying only the pitch and width of the IDT fingers.

FIG. 16 is a chart showing results from simulating a second filter usingfive XBARs. The schematic diagram of the second filter is the same asthe filter 1400 of FIG. 14. The XBARs are formed on a Z-cut lithiumniobate (0.4 um thick) piezoelectric plate. The substrate is silicon,and the IDT electrodes are copper. Adjusting the resonant frequencies ofthe resonators is accomplished by varying the pitch and width of the IDTfingers and by providing a front-side dielectric layer on the shuntresonators to reduce their frequencies. The other physical parameters ofthe resonators are provided in the following table (all dimensions arein microns):

Series Resonators Shunt Resonators Parameter 1410A 1410B 1410C 1420A1420B p 4.189 4.07 4.189 4.2 4.2 w 0.494 0.505 0.494 0.6 0.6 AP 46.423.6 46.4 80.1 80.1 L 1000 1000 1000 1000 1000 tfd 0 0 0 0.106 0.106

The performance of the filter was simulated using a 3D finite elementmodeling tool. The curve 1610 is a plot of S21, the input-outputtransfer function, of the simulated filter 1400 as a function offrequency. The filter bandwidth is about 800 MHz, centered at 4.75 GHz.The simulated performance does not include resistive or viscous losses.

The first and second filters (whose S21 transmission functions are shownin FIG. 15 and FIG. 16) are examples of filters using XBARs. A filtermay use more or fewer than two shut resonators, more or fewer than threeseries resonators, and more or fewer than five total resonators. Afilter may use reactive components, such as capacitors, inductors, anddelay lines in addition to XBARs. Further fine tuning of the individualresonators of these filters may improve filter performance.

Description of Methods

FIG. 17 is a simplified flow chart showing a process 1700 for making anXBAR or a filter incorporating XBARs. The process 1700 starts at 1705with a substrate and a plate of piezoelectric material and ends at 1795with a completed XBAR or filter. The flow chart of FIG. 17 includes onlymajor process steps. Various conventional process steps (e.g. surfacepreparation, cleaning, inspection, baking, annealing, monitoring,testing, etc.) may be performed before, between, after, and during thesteps shown in FIG. 17.

The flow chart of FIG. 17 captures three variations of the process 1700for making an XBAR which differ in when and how cavities are formed inthe substrate. The cavities may be formed at steps 1710A, 1710B, or1710C. Only one of these steps is performed in each of the threevariations of the process 1700.

The piezoelectric plate may be, for example, Z-cut lithium niobate orlithium tantalate as used in the previously presented examples. Thepiezoelectric plate may be some other material and/or some other cut.The substrate may preferably be silicon. The substrate may be some othermaterial that allows formation of deep cavities by etching or otherprocessing.

In one variation of the process 1700, one or more cavities are formed inthe substrate at 1710A, before the piezoelectric plate is bonded to thesubstrate at 1720. A separate cavity may be formed for each resonator ina filter device. The one or more cavities may be formed usingconventional photolithographic and etching techniques. Typically, thecavities formed at 1710A will not penetrate through the substrate, andthe resulting resonator devices will have a cross-section as shown inFIG. 3A or FIG. 3B.

At 1720, the piezoelectric plate is bonded to the substrate. Thepiezoelectric plate and the substrate may be bonded by a wafer bondingprocess. Typically, the mating surfaces of the substrate and thepiezoelectric plate are highly polished. One or more layers ofintermediate materials, such as an oxide or metal, may be formed ordeposited on the mating surface of one or both of the piezoelectricplate and the substrate. One or both mating surfaces may be activatedusing, for example, a plasma process. The mating surfaces may then bepressed together with considerable force to establish molecular bondsbetween the piezoelectric plate and the substrate or intermediatematerial layers.

A conductor pattern, including IDTs of each XBAR, is formed at 1730 bydepositing and patterning one or more conductor layer on the front sideof the piezoelectric plate. The conductor layer may be, for example,aluminum, an aluminum alloy, copper, a copper alloy, or some otherconductive metal. Optionally, one or more layers of other materials maybe disposed below (i.e. between the conductor layer and thepiezoelectric plate) and/or on top of the conductor layer. For example,a thin film of titanium, chrome, or other metal may be used to improvethe adhesion between the conductor layer and the piezoelectric plate. Aconduction enhancement layer of gold, aluminum, copper or other higherconductivity metal may be formed over portions of the conductor pattern(for example the IDT bus bars and interconnections between the IDTs).

The conductor pattern may be formed at 1730 by depositing the conductorlayer and, optionally, one or more other metal layers in sequence overthe surface of the piezoelectric plate. The excess metal may then beremoved by etching through patterned photoresist. The conductor layercan be etched, for example, by plasma etching, reactive ion etching, wetchemical etching, and other etching techniques.

Alternatively, the conductor pattern may be formed at 1730 using alift-off process. Photoresist may be deposited over the piezoelectricplate. and patterned to define the conductor pattern. The conductorlayer and, optionally, one or more other layers may be deposited insequence over the surface of the piezoelectric plate. The photoresistmay then be removed, which removes the excess material, leaving theconductor pattern.

At 1740, a front-side dielectric layer may be formed by depositing oneor more layers of dielectric material on the front side of thepiezoelectric plate. The one or more dielectric layers may be depositedusing a conventional deposition technique such as sputtering,evaporation, or chemical vapor deposition. The one or more dielectriclayers may be deposited over the entire surface of the piezoelectricplate, including on top of the conductor pattern. Alternatively, one ormore lithography processes (using photomasks) may be used to limit thedeposition of the dielectric layers to selected areas of thepiezoelectric plate, such as only between the interleaved fingers of theIDTs. Masks may also be used to allow deposition of differentthicknesses of dielectric materials on different portions of thepiezoelectric plate.

In a second variation of the process 1700, one or more cavities areformed in the back side of the substrate at 1710B. A separate cavity maybe formed for each resonator in a filter device. The one or morecavities may be formed using an anisotropic or orientation-dependent dryor wet etch to open holes through the back-side of the substrate to thepiezoelectric plate. In this case, the resulting resonator devices willhave a cross-section as shown in FIG. 1.

In the second variation of the process 1700, a back-side dielectriclayer may be formed at 1750. In the case where the cavities are formedat 1710B as holes through the substrate, the back-side dielectric layermay be deposited through the cavities using a convention depositiontechnique such as sputtering, evaporation, or chemical vapor deposition.

In a third variation of the process 1700, one or more cavities in theform of recesses in the substrate may be formed at 1710C by etching thesubstrate using an etchant introduced through openings in thepiezoelectric plate. A separate cavity may be formed for each resonatorin a filter device. The one or more cavities formed at 1710C will notpenetrate through the substrate, and the resulting resonator deviceswill have a cross-section as shown in FIG. 3A or FIG. 3B.

In all variations of the process 1700, the filter device is completed at1760. Actions that may occur at 1760 include depositing anencapsulation/passivation layer such as SiO₂ or Si₃O₄ over all or aportion of the device; forming bonding pads or solder bumps or othermeans for making connection between the device and external circuitry;excising individual devices from a wafer containing multiple devices;other packaging steps; and testing. Another action that may occur at1760 is to tune the resonant frequencies of the resonators within thedevice by adding or removing metal or dielectric material from the frontside of the device. After the filter device is completed, the processends at 1795.

Closing Comments

Throughout this description, the embodiments and examples shown shouldbe considered as exemplars, rather than limitations on the apparatus andprocedures disclosed or claimed. Although many of the examples presentedherein involve specific combinations of method acts or system elements,it should be understood that those acts and those elements may becombined in other ways to accomplish the same objectives. With regard toflowcharts, additional and fewer steps may be taken, and the steps asshown may be combined or further refined to achieve the methodsdescribed herein. Acts, elements and features discussed only inconnection with one embodiment are not intended to be excluded from asimilar role in other embodiments.

As used herein, “plurality” means two or more. As used herein, a “set”of items may include one or more of such items. As used herein, whetherin the written description or the claims, the terms “comprising”,“including”, “carrying”, “having”, “containing”, “involving”, and thelike are to be understood to be open-ended, i.e., to mean including butnot limited to. Only the transitional phrases “consisting of” and“consisting essentially of”, respectively, are closed or semi-closedtransitional phrases with respect to claims. Use of ordinal terms suchas “first”, “second”, “third”, etc., in the claims to modify a claimelement does not by itself connote any priority, precedence, or order ofone claim element over another or the temporal order in which acts of amethod are performed, but are used merely as labels to distinguish oneclaim element having a certain name from another element having a samename (but for use of the ordinal term) to distinguish the claimelements. As used herein, “and/or” means that the listed items arealternatives, but the alternatives also include any combination of thelisted items.

It is claimed:
 1. An acoustic resonator device comprising: a substratehaving a surface; a single-crystal piezoelectric plate having front andback surfaces, the back surface attached to the surface of the substrateexcept for a portion of the piezoelectric plate forming a diaphragm thatspans a cavity in the substrate; and an interdigital transducer (IDT)formed on the front surface of the single-crystal piezoelectric platesuch that interleaved fingers of the IDT are disposed on the diaphragm,the single-crystal piezoelectric plate and the IDT configured such thata radio frequency signal applied to the IDT excites a shear primaryacoustic mode within the diaphragm, wherein the diaphragm is contiguouswith the piezoelectric plate around at least 50% of a perimeter of thecavity.
 2. The device of claim 1, wherein a direction of acoustic energyflow of the primary acoustic mode is substantially orthogonal to thefront and back surfaces of the diaphragm.
 3. The device of claim 1,wherein the single-crystal piezoelectric plate is one of lithium niobateand lithium tantalate.
 4. The device of claim 1, wherein a thicknessbetween the front and back surfaces of the single-crystal piezoelectricplate is greater than or equal to 200 nm and less than or equal to 1000nm.
 5. The device of claim 4, wherein a pitch of the fingers of the IDTis greater than or equal to 2 times the thickness of the single-crystalpiezoelectric plate and less than or equal to 25 times the thickness ofthe piezo electric plate.
 6. The device of claim 5, wherein the fingersof the IDT have a width, and the pitch is greater than or equal to 2times the width and less than or equal to 25 times the width.
 7. Thedevice of claim 1, further comprising: a front-side dielectric layerformed on the front surface of the single-crystal piezoelectric plateover the IDT, wherein a resonant frequency of the primary acoustic modeis determined, in part, by a thickness of the front-side dielectriclayer.
 8. The device of claim 7, wherein the front-side dielectric layercomprises at least one of silicon dioxide and silicon nitride.
 9. Thedevice of claim 7, wherein a thickness of the front-side dielectriclayer is greater than zero and less than or equal to 500 nm.
 10. Thedevice of claim 1, further comprising: a back-side dielectric layerdisposed on the back surface of the diaphragm, wherein a resonantfrequency of the primary acoustic mode is determined, in part, by athickness of the back-side dielectric layer.
 11. The device of claim 10,wherein the back-side dielectric layer comprises at least one of silicondioxide and silicon nitride.
 12. The device of claim 1, wherein the IDTcomprises one of aluminum, an aluminum alloy, copper, a copper alloy,beryllium, and gold.
 13. The device of claim 1, wherein a z-axis of thesingle-crystal piezoelectric plate is normal to the front and backsurfaces, and the IDT is oriented such that the fingers of the IDT areparallel to an x-axis of the piezoelectric plate.
 14. A filter device,comprising: a substrate; a single-crystal piezoelectric plate havingfront and back surfaces, the back surface attached to the surface of thesubstrate, portions of the single-crystal piezoelectric plate formingone or more diaphragms spanning respective cavities in the substrate;and a conductor pattern formed on the front surface, the conductorpattern including a plurality of interdigital transducers (IDTs) of arespective plurality of acoustic resonators, interleaved fingers of eachof the plurality of IDTs disposed on one of the one or more diaphragms,wherein the single-crystal piezoelectric plate and all of the IDTs areconfigured such that a respective radio frequency signal applied to eachIDT excites a respective shear primary acoustic mode within therespective diaphragm, and each of the one or more diaphragms iscontiguous with the piezoelectric plate around at least 50% of aperimeter of the respective cavity.
 15. The filter device of claim 14,wherein a direction of acoustic energy flow of all of the shear primaryacoustic modes is substantially orthogonal to the front and backssurfaces of the respective diaphragms.
 16. The filter device of claim14, wherein a thickness between the front and back surfaces of thesingle-crystal piezoelectric plate is greater than or equal to 200 nmand less than or equal to 1000 nm.
 17. The filter device of claim 14,wherein each of the plurality of IDTs is disposed on a respectivediaphragm spanning a respective cavity.
 18. The filter device of claim14, wherein each of the plurality of IDTs has a respective pitch greaterthan or equal to 2 times the thickness of the single-crystalpiezoelectric plate and less than or equal to 25 times the thickness ofthe piezoelectric plate.
 19. The filter device of claim 14, wherein theplurality of resonators includes a shunt resonator and a seriesresonator.
 20. The filter device of claim 19, wherein a thickness of afirst dielectric layer deposited over the IDT of the shunt resonator isgreater than a thickness of a second dielectric layer deposited over theIDT of the series resonator.
 21. A method of fabricating an acousticresonator device on a single-crystal piezoelectric plate having frontand back surfaces, the back surface attached to a substrate, the methodcomprising: forming a cavity in the substrate such that a portion of thesingle-crystal piezoelectric plate forms a diaphragm spanning thecavity; and forming an interdigital transducer (IDT) on the frontsurface of the single-crystal piezoelectric plate such that interleavedfingers of the IDT are disposed on the diaphragm, the single-crystalpiezoelectric plate and the IDT configured such that a radio frequencysignal applied to the IDT excites a shear primary acoustic mode withinthe diaphragm, wherein the diaphragm is contiguous with thesingle-crystal piezoelectric plate around at least 50% of a perimeter ofthe cavity.